Yiyi Wang
- Graduate Student until May 2008
- Email/ yiyiwang@physics.bu.edu
- Office/ Metcalf Science Building, Room B46A (617-353-7291)
Research Descriptions:
Real-Time X-Ray Studies of Ion Bombardment/Plasma Processing
Ion bombardment of surfaces is at the core of sputtering and plasma processing technologies that are vital to several of the largest manufacturing industries in the world. However, recent experimental and theoretical studies of surface morphology evolution during ion sputter erosion suggest that there is a rich variety to surface morphology evolution during ion bombardment. Our group currently focuses on the low energy Ar+ ion bombardment of Si and GaSb surfaces. We study the evolution of Si and GaSb surface morphology using real-time x-ray scattering techniques and ex-situ AFM analysis. Synchrotron-based real-time x-ray studies offer at least five important advantages in gaining fundamental atomic-level insight into such processes: penetration of ambient gaseous/liquid environments, ability to vary depth of structural sensitivity, ability to probe structures from 0.1-100 nm in length scale, subsecond temporal resolution, and ease of interpretation. To take advantage of these powerful attributes, we have constructed a new facility in the back hutch of NSLS beamline X21, funded with NSF-MRI and NSF-IMR support, which is being spearheaded by collaborators at the University of Vermont (R. Headrick), Boston University (K. Ludwig and T. Moustakas).
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